基于干涉法测微小位移

The Measurement of Micro Displacement Based on Interferometry

本文提供一种应用迈克尔逊干涉仪及微弱电信号检测处理系统测量微小位移的设计方案。在光学平台上搭建出实验光路,并通过后续电路完成光电转换和信号放大,通过计算机对数字信号的分析实现对微小位移的测量。

This article provides a design scheme for measuring microdisplacement. In this design michelson interferometer and the system of measuring and processing faint electric signal are applied. An experimental light path is built on the optical platform and then by the subsequent circuit photoelectric conversion and signal amplification are accomplished. After that a computer will be used to analyze the digital signals in order to realize the function of measuring micro displacement.