二元光学元件横向加工误差对衍射效率的影响

Analysis of Effect of Lateral Fabrication Errors on Binary Optical Elements

横向加工误差包括对准误差和线宽误差,加工误差对衍射效率的影响是二元光学元件研究的重要问题。本文基于标量衍射理论,提出了一种与MATLAB相结合的分层计算方法,重点分析了4阶和8阶二元光学元件横向加工误差和衍射效率的关系。结果表明,控制8阶二元光学元件对准误差,可抑制衍射效率的迅速下降,适当调整线宽能够减小对准误差造成的影响。这些结果对二元光学元件的加工有重要的参考价值。该方法简便且适用性强,可对二元光学元件的加工误差进行准确分析。

Misalignment and line width errors are main fabrication errors in Binary Optical Elements（BOE）.It is important to analyze the influence of fabrication errors on binary optical element designers.We provided a layer by layer MATLAB analysis method based on scalar diffraction theory to study relationship between diffractive efficiency and lateral fabrication errors about 4 step and 8 step binary optical elements.Our main findings are that diffraction efficiency can be controlled by dominating misalignment errors for 8 step binary optical elements,and it also can be compensated by adjusting line width and alignment.This method is convenient and precise to analyze fabrication errors of binary optical elements.