摘要
基于模糊PID控制理论,介绍了步进扫描光刻机中工件台同步扫描的控制方法,并简要介绍了相关的控制理论基础知识,详细阐述了模糊控制器的制作过程和模糊规则的制定方法。另外针对同步扫描控制的难点,简要介绍了步进扫描光刻机的同步扫描过程,而且建立了同步运动的执行器直线电机的仿真模型。采用模糊PID理论对同步扫描系统进行控制策略研究,仿真实验表明,硅片台稳态误差及掩膜台稳态误差能够快速衰减达到稳定状态,而同步误差的精度也能达到微米级别。这种方案具有较好的动态特性及鲁棒性,同步误差较小,有望满足高精度同步扫描的要求。
Based on the fuzzy PID control theory,the synchronous scan control method of the stage on the step and scan lithography machine is described,and the relevant control theory is also briefly introduced.In addition,the manufacture process of fuzzy control devices and the method of selecting fuzzy rules are described in detail.In allusion to the control difficulty of synchronous scanning,the synchronous scanning process of the step and scan lithography is also briefly introduced.And the simulation model of the linear motor for a synchronous movement actuator was established.The theory of the fuzzy PID was used for the control strategy research of the synchronous scanning system.Simulation results show that the steady errors of the silicon stage and mask stage can fast attenuate to the stable state.Besides that,the synchronous error could reach the micro-level.The fuzzy PID control method has good dynamic characteristics and robustness,and small synchronous error,satisfying the requirement of high-precision synchronous scanning.
出处
《微纳电子技术》
CAS
北大核心
2011年第9期591-595,605,共6页
Micronanoelectronic Technology
基金
国家高技术研究发展计划(863计划)资助项目(2009AA03Z341)
国家自然科学基金资助项目(61076100)
