激光自动对准系统中快速反射镜机构研究

Fast Steering Mirror in Laser Autocollimato

针对激光自动对准系统,开展了快速反射镜机构研究。利用2个直线步进电机,分别驱动2对楔块,通过楔形摩擦副实现快速反射镜的两维转动,应用楔块角度自锁,实现快速反射镜对光轴的精密调整和精度保持。为保证激光对准系统工作时,对准激光经快速反射镜后能始终返回CCD视场内,确定快速反射镜的工作转角范围:方位为±6.975′,俯仰为±5.25′;为保证分辨率<1″,确定快速反射镜的楔块角度为4°,直线步进电机的步长为0.0015μm。经过试验验证,快速反射镜调整精度<1″。

A novel fast steering mirror was designed on the basis of the research on the structure and working principle of a laser autocollimator.The two-dimensional running of the fast steering mirror could be realized by two beeline motors driving two wedges.Self-locking of the wedge mechanism could be used to achieve precision and accuracy.The work scope of the fast steering mirror was A±6.975＇,E±5.25＇.When the laser autocollimator was working,the laser could always return the CCD.In order to ensure the precision less than 1″,the angle of the wedge was 4°,and the step length of the motor was 0.001 5 μm.The experiment results showed that the precision was less than 1″.