摘要
对两种不同比表面积(BET)的铟锡氧化物(ITO)纳米粉末进行退火处理,研究和比较了温度对两种粉末微观组织和结构的影响,并对这两种粉末烧结的靶材进行了比较。结果表明,在800～1500℃进行不同温度的退火处理后,在1200℃以上,两种比表面积的ITO粉末粒径增长显著,颗粒之间出现了相互合并和结合长大现象,而高BET粉末的粒径增加幅度比低BET粉末的更大;在1525℃烧结后,用高BET粉末烧成的靶材的晶粒和气孔尺寸更大,气孔数量也更多。
The annealing treatment was carried out for the two kinds of BET（specific surface area） indium tin oxide（ITO） nano-powders, and the influence of annealing temperatures on the microstructure and crystal structure was studied and compared for the two kinds of powders, in addition, the targets prepared by the two powders were also compared. The results show that after annealing treatment between 800℃ and 1500℃, the particle sizes of two kinds of ITO powders increase obviously at the temperatures above 1200℃, and the grains occur interlinking and coarsening, where the growing degree of grains is greater in the higher BET powders than that in the lower BET ones. After sintering at 1525℃, there are coarser grains and cavities as well as more cavities in the target prepared by higher BET powders than the lower ones.
出处
《材料导报》
EI
CAS
CSCD
北大核心
2011年第18期30-34,共5页
Materials Reports
