摘要
阐述了玻璃衬底、柔性衬底透明导电氧化物薄膜(Transparent conductive oxides-TCO)以及硅基薄膜太阳电池应用方面的最新研究成果。绒面结构可以提高薄膜太阳电池效率和稳定性并降低生产成本。磁控溅射技术和LP-MOCVD技术是制造绒面结构ZnO-TCO薄膜(例如"弹坑"状和"类金字塔"状表面)的主流生长技术;高迁移率TCO薄膜(IMO、IWO、ZnO∶Ga等)以及柔性衬底TCO薄膜是研究开发的重点。
The up-to-date experiment progresses in TCO thin films on glass and flexible substrates and their applications for Si-hased thin film solar cells were presented. Textured surface with good light scattering can improve the solar cells efficiency, stability and reduce the production costs. Magnetron sputtering and LP-MOCVD are the main fabrication technology for textured ZnO-TCO thin films. TCO thin films (IMO, IWO, ZnO : Ga) with high mobility and these thin films on the flexible substrates have become the key issues.
出处
《材料导报》
EI
CAS
CSCD
北大核心
2011年第18期73-77,共5页
Materials Reports
基金
国家重点基础研究发展计划(2011CBA00705
2011CBA00706
2011CBA00707)
国家高技术研究发展计划(2009AA050602)
天津市应用基础及前沿技术研究计划(09JCYBJC06900)
中央高校基本科研业务费专项资金项目(65010341)
关键词
镀膜技术
TCO薄膜
绒面结构
高迁移率
缓冲层
梯度掺杂
薄膜太阳电池
thin-films fabrication technology, TCOs, textured surface, high mobility, buffer layers, gradual doping growth, thin film solar cells