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薄膜太阳电池用TCO薄膜制造技术及其特性研究 被引量：5

Research on the Fabrication Technology and Characteristics for TCO Thin Films Applied in Thin Film Solar Cells
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摘要 阐述了玻璃衬底、柔性衬底透明导电氧化物薄膜(Transparent conductive oxides-TCO)以及硅基薄膜太阳电池应用方面的最新研究成果。绒面结构可以提高薄膜太阳电池效率和稳定性并降低生产成本。磁控溅射技术和LP-MOCVD技术是制造绒面结构ZnO-TCO薄膜(例如"弹坑"状和"类金字塔"状表面)的主流生长技术;高迁移率TCO薄膜(IMO、IWO、ZnO∶Ga等)以及柔性衬底TCO薄膜是研究开发的重点。 The up-to-date experiment progresses in TCO thin films on glass and flexible substrates and their applications for Si-hased thin film solar cells were presented. Textured surface with good light scattering can improve the solar cells efficiency, stability and reduce the production costs. Magnetron sputtering and LP-MOCVD are the main fabrication technology for textured ZnO-TCO thin films. TCO thin films （IMO, IWO, ZnO ： Ga） with high mobility and these thin films on the flexible substrates have become the key issues.
作者 陈新亮 王斐 闫聪博 李林娜 林泉 倪牮 张晓丹 耿新华 赵颖
机构地区 南开大学光电子薄膜器件与技术研究所 南开大学光电子薄膜器件与技术天津市重点实验室 南开大学光电信息技术科学教育部重点实验室
出处 《材料导报》 EI CAS CSCD 北大核心 2011年第18期73-77,共5页 Materials Reports
基金 国家重点基础研究发展计划(2011CBA00705 2011CBA00706 2011CBA00707) 国家高技术研究发展计划(2009AA050602) 天津市应用基础及前沿技术研究计划(09JCYBJC06900) 中央高校基本科研业务费专项资金项目(65010341)
关键词 镀膜技术 TCO薄膜 绒面结构 高迁移率 缓冲层 梯度掺杂 薄膜太阳电池 thin-films fabrication technology, TCOs, textured surface, high mobility, buffer layers, gradual doping growth, thin film solar cells
分类号 TN304.054 [电子电信—物理电子学] TN304.25 [电子电信—物理电子学]
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参考文献11

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二级参考文献46

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共引文献33

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引证文献5

二级引证文献8

材料导报
2011年 第18期

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