摘要
CO2激光对熔石英损伤修复的机理主要是通过激光的热效应使表面发生熔融,对损伤处起到弥合作用使元件的表面结构趋于完整。近几年CO2激光修复的方法按激光扫描方式可以分为光栅式扫描法和振镜扫描法。利用逐渐提高功率的扫描方式可以有效减少修复过程中气泡的产生,用高温退火的方式可以完全消除或者消除大部分修复后产生的应力,这取决于损伤点的尺寸。多种处理工艺相结合的方法可以有效提高修复后的损伤阈值。
The mechanism of CO2 laser treatment for repair damage in fused silica is mainly using laser heating methods,and smoothing the damage point. In recent years, the methods of CO2 laser treatment can be classified into raster scanning and galvanometer scanning in terms of scanning methods. The number of bubbles can be reduced by slowly increasing the power of the surface during mitigation. And the stress can be completely or partly eliminated by high temperature annealing,it depends on the size of damage point. Combining various forms of methods can improve the damage threshold obviously.
出处
《材料导报》
EI
CAS
CSCD
北大核心
2011年第19期118-122,共5页
Materials Reports
基金
国家"863"课题(2008AA8040508)
