压力传感器芯片设计及温度分析

Design and Temperature Analysis of Pressure Sensor

设计了双岛梁结构量程是200 Pa的超微压力传感器,进行了理论分析与计算,并对模片上的电阻条的宽度和长度进行了研究,为传感器惠斯通电桥的设计提供了重要的依据。通过有限元仿真软件,对传感器进行了温度分析,探索出了传感器的工作温度范围。最后,对传感器芯片尺寸进行了相关分析,发现随着尺寸增加和膜片厚度减小,纵向、横向、纵横应力差及Von Mises应力均增加,但弯曲程度也相应增大,即灵敏度提高,线性度下降。

The two island-beam-diaphragm structure sensor was adopted.The range of the sensor is 200 Pa.So the sensor can measure the micro-pressure.Relative theoretical analysis and calculation was carried out.The width and length of the resistors were researched,which provided important scientific basis for Wheatstone bridge design.Through the finite element method software,the temperature simulation of the sensor was taken.The work temperature range was explored.Finally it analyzed the chip size of the sensor,found out that as the film＇s size increased and its thickness decreased,stress force over the film increased,while the deflection also increased,that is,the sensitivity increased while linearity decreased.