ZnO/Ag/ZnO多层结构薄膜的光电性质

Optoelectronic Properties of ZnO/Ag/ZnO Multiple Films

通过磁控溅射方法生长了不同银层厚度的ZnO/Ag/ZnO多层结构的薄膜,并对其形貌、光吸收谱、光致发光和光响应特性进行了比较研究。结果表明ZnO薄膜中银薄层的加入使得光致发光的强度增强。银层厚度为6 nm样品制成的器件在350 nm处的光响应度为0.06 A/W,相对于ZnO薄膜提高了一个数量级。而当银层厚度达到15 nm时,光响应度反而下降。

The ZnO/Ag/ZnO multiple films with different thickness of Ag film were grown via magnetron sputtering method.The morphology,optical absorption spectra,photoluminescence and photoresponse properties were studied.The results exhibited that the intensity of photoluminescence was increased with the adding of the Ag film into ZnO film.The photo responsivity was 0.06 A/W at 350 nm when the thickness of the Ag film was 6 nm.Compared with ZnO film this value was improved one magnitude.However,the photo responsivity was decreased when the thickness of the Ag film was reached 15 nm.