摘要
针对现有激光超声薄膜杨氏模量测量方法,提出了一种新型的光束微偏转探测技术。该技术采用差分检测方法抑制了系统共模噪声;采用共焦结构增强了检测系统稳定性、减弱了环境扰动的影响。并阐述了此探测技术的工作原理。将其应用于激光超声薄膜杨氏模量测量系统,获得了声表面波在标准样品中的传播色散曲线。实验色散曲线与理论计算值的良好拟和验证了此探测技术的实用性。
Aimed at thin fihn＇ s Young＇ s modulus measurement method by laser generated ultrasonic, a novel light deflection detecting method is proposed. This technology adopts differential detecting method to restrain common model noises. Confocal structure is used to enhance the system＇s stability and to reduce influence of disturbances of environment. Its working principle is explained. This method is applied in film＇ s Young＇ s modulus measuring system by laser generated surface acoustic wave （SAW）. An experimental dispersion curve of SAW propagation in a standard sample is obtained. Good fitting result of this experimental dispersion curve with its theoretical calculation curve proves this detecting method＇ s practicability.
出处
《传感器与微系统》
CSCD
北大核心
2011年第10期50-52,55,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(6072300461072013)
关键词
激光超声检测
差分检测
共焦结构
声表面波
光偏转
laser-generated ultrasonic detection
differential detection
confocal structure
surface acoustic waves（SAW）
light deflection
