摘要
通常,在半导体设备刚性结构设计中要求零部件有很高的加工制造精度和装配精度,同时易传递振动、热等,并容易引入附加的力和转矩。为降低质量和成本,并提高工作性能,目前在工件台的设计中广泛采用柔性结构设计技术。列举了常见柔性件结构形式,并分析了不同结构形式柔性件的旋转刚度和精度等特性。同时,根据工件台的实际工作状态和性能需求,选取适用的柔性件结构形式,并结合弹性静力学的理论公式,进行工件台中常用柔性件设计和计算。
Relative to rigid structure technology,flexible structure technology has more advantage,such as low force and moment transmissibility,low manufacturing cost,low assembly difficulty,etc.Flexible structure also can simplify a machine configuration and error compensation will be applied while the disturbance can be identified easily.The most important application of flexible structure technology is applying flexible hinge in proper shape and rotation stiffness to design machine.This paper introduces flexible structure technology in the design of wafer stage configuration.By using flexible structure,the performance of the wafer stage is improved and also save the manufacturing cost and reduce the assembly difficulty.
出处
《电子工业专用设备》
2011年第9期1-6,53,共7页
Equipment for Electronic Products Manufacturing
关键词
柔性结构
柔性铰链
旋转刚度
工件台
Flexible structure
Flexible hinge
Rotation stiffness
Wafer stage
