摘要
描述了真空设备在半导体行业中的运用,通过分析影响真空设备极限真空度的3个主要原因,讲述了真空设备检修方法及措施。
Described application of vacuum equipments in the semiconductor industry.Through analyzing three mainly causes of affecting the limit of equipment vacuum,it expatiates on the method to service vacuum equipment.
出处
《电子工业专用设备》
2011年第9期18-20,45,共4页
Equipment for Electronic Products Manufacturing
关键词
真空
测量
泵
检漏
Vacuum
Measure
Pump
Leak detection
