YBCO薄膜的织构和孪晶的XRD分析

Alignment and Twin Domain in YBCO Films Analyzed by XRD

采用多元电子束物理气相沉积法在{001}LAO衬底上制备了YBCO薄膜,采用X射线衍射分析了其取向和孪晶结构,结果表明,薄膜中除了8%C取向的四方相外;其余为正交相,而正交相中存在27%的a取向,3%的b取向以及62%的C取向,且C取向晶粒存在面内90°±0.81°<110>孪晶。四方到正交相变不完全引起四方相残留、局部微环境差异、相变应力以及取向性薄膜相变弹性应变能的方向性等是引起正交相多取向以及孪晶的主要原因。

The YBCO film was grown on {001 } LAO substrate by muhi-phase electron beam-physical vapor deposition technology, and the texture and twin domain of the film were analyzed by the high resolution X-ray diffraction. The results showed that there were 8% C-oriented tetragonal crystalline besides orthorhombic in the film, and the orthorhombic crystalline consisted of 27% a-oriented, 3% b-oriented and 62% C-oriented, meanwhile there were in-plane 90°±0.81°〈 110 〉 twin domains in the C-oriented grain. The incomplete phase transition caused the tetragonal crystalline remaining. The main reasons of multi-orientations and twin domains existing in the orthorhombic crystalline were the local difference of micro envi- ronment, phase transition stress and anisotropy.