A Generalized Analytical Model of a Multispecies Plasma Immersion Ion Implantation Process in a Collisionless System
被引量：1
A Generalized Analytical Model of a Multispecies Plasma Immersion Ion Implantation Process in a Collisionless System
出处
《材料科学与工程（中英文B版）》
2011年第3期372-377,共6页
Journal of Materials Science and Engineering B
关键词
等离子体浸没离子注入 碰撞系统 模型 广义 多种群 PIII 脉冲电压 设备制造
Plasma immersion ion implantation, ion-matrix sheath, dynamic sheath, ion plasma frequency, characteristics ion velocitydoping concentration.
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