静电放电发生器模型的研究及应用

Study and Application of ESD Generator Model

随着微电子元件的广泛应用,静电危害现象日益突出。ESD是一种很难重复的随机过程。在这种情况下,本文根据IEC61000-4-2标准,构建等效人体-金属模型的静电仿真电路,对放电过程进行仿真分析,为静电发生器放电回路结构及元件参数的确定及参数对ESD放电过程的影响提供一定的理论参考依据,还为更好的了解ESD过程的特点及影响因素,从而进行有效的ESD保护等研究方面提供了便捷、可靠的研究手段。仿真结果表明静电波形参数均在标准误差范围之内。由此证明模型参数设计正确,对ESD过程分析合理。

Phenomenon of electrostatic hazards is becoming increasingly prominent with wide application of microelectronic elements. Electrostatic discharge （ESD） is a stochastic process which is difficult to repeat. According to the request of standard IEC61000-4-2, simulation circuit of the equivalent Human-Metal Model is established, discharging process is simulated and analyzed, so the structure of discharging circuit and element parameters can be determined to some extent, and the characteristics and influencing factors of ESD process can be known better. Simulation results show that waveform parameters are all within the range of standard errors, which proves that the design of model parameters is correct, the analysis of ESD process is reasonable.