摘要
介绍了Isara 400 3维超精坐标测量机标定的关键技术,包括平台标定和系统镜面台非垂直度标定。同时,提出了一种新的超精接触探针系统,给出了这种3维灵敏度探针的标定结果。
This paper presents critical aspects of the calibration of the Isara 400 ultra-precision 3D Coordinat Measuring Machine（CMM）,such as the calibration of flatness and out-of-squareness of the system＇s mirror table.In addition,a newly developed ultra-precision tactile probe system is described and the results of the 3D sensitivity calibration of this probe are presented.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2011年第9期2236-2241,共6页
Optics and Precision Engineering
基金
Supported by Nano CMM(No.FP6-026717-2)and Production 4μ(No.FP6-2004-NI-4)
关键词
纳米技术
坐标测量机
接触探针
标定
nanotechnology
Coordinate Measuring Machine（CMM）
touch probe
calibration
