摘要
The resonant absorption of a plasma surface wave is supposed to be an important and efficient mechanism of power deposition for a surface wave plasma source. In this paper, by using the particle-in-cell method and Monte Carlo simulation, the resonance absorption mechanism is investigated. Simulation results demonstrate the existence of surface wave resonance and show the high efficiency of heating electrons. The positions of resonant points, the resonance width and the spatio-temporal evolution of the resonant electric field are presented, which accord well with the theoretical results. The paper also discusses the effect of pressure on the resonance electric field and the plasma density.
The resonant absorption of a plasma surface wave is supposed to be an important and efficient mechanism of power deposition for a surface wave plasma source. In this paper, by using the particle-in-cell method and Monte Carlo simulation, the resonance absorption mechanism is investigated. Simulation results demonstrate the existence of surface wave resonance and show the high efficiency of heating electrons. The positions of resonant points, the resonance width and the spatio-temporal evolution of the resonant electric field are presented, which accord well with the theoretical results. The paper also discusses the effect of pressure on the resonance electric field and the plasma density.
