摘要
本文利用光束在对称双面金属包覆波导表面反射时古斯-汉欣(Goos-Hanchen)位移具有极大的增强效应,提出一种灵敏度的极高的新型位移传感器。与传统的光强传感器相比,这种传感器消除了光源的能量波动对灵敏度的影响,从而能够观测更加微小的位移变化。在实验上实现了8pm微小位移传感。研究表明,该器件测量实时性强、精确度较高、设备简单、成本低、易于调节等诸优点,预计在微加工等领域具有很高的研究和应用价值。
In this paper, a novel kind of displace sensor was proposed, which utilizing the enhanced Goos - Hanchen displace caused by a light beam reflection on the surface of a sysmmetrical metal - cladding wave guide. Compared with tradional light intensity sensor, this kind of sensor can detect more small displace change by eliminating the influence of the energy fluctuation of the laser on sensitivity. A 8pm displace change was detected in the experiment. This kind of displace sensor, which promises an wide application in field of microfabrication, have various kinds of merits, such as better measurement in time, higher sensitivity, easy fabrication and lower cost, etc.
出处
《激光杂志》
CAS
CSCD
北大核心
2011年第5期10-11,共2页
Laser Journal
