芯片制造企业节水评价指标体系研究--以上海浦东企业为例

Water Saving Evaluation Index of Wafer Fabrication Facilities in Shanghai Pudong

以国家节水企业评价标准与其他类似节水指标为指导,结合芯片制造产业特征与台湾同类企业评价标准,总结提出针对芯片制造产业的节水评价指标。设计指标从总体用水,主要生产单元以及主要辅助单元三方面考察企业用水情况,其中主要生产单元用水作为重要考察对象,包括纯水制造单元和芯片制造线的清洗水回收。运用该指标对现有浦东典型企业用水状况和节水潜力进行评估。结果显示,A厂主要生产单元总回用率达到70.4%,清洗水回用率达到75.6%,明显高于B厂,而按传统计算内循环水为回用水时,两厂回用率均在98%左右,相差不大,说明所设计指标能较直接准确地反映企业的节水水平。

An evaluation index of water saving in semiconductor industry was studied in consideration of its water using characteristics,with reference to national evaluation guidance for water saving enterprises and similar standards in Taiwan.Three factors were taken into account including overall water using,main units and auxiliary units.Emphasis was put on main units,including ultrapure water system and rinse water.Case study was followed based on statistics from two typical plants in Pudong,Shanghai.Results of the two plants varied a lot.Overall reclamation rate of main units in Plant A was 70.4%,and reclamation rate of cleaning water was 75.6%,both were much higher than that in Plant B,whereas the reclamation rate was both around 98% when counting inner recycling in,which indicated the improving indicator system workable.