摘要
为了使真空机器人获得高速、高精度的运动性能并减少系统的残余振动,文中提出了一种加加速度受限的非对称轨迹规划方法。首先阐述了该轨迹规划方法中轨迹限制条件的定义,然后根据定义的限制条件值给出了所有可能的加速度轨迹形状,并给出了各种轨迹形状下的完整算法及实现,最后将该算法应用于真空机器人运动规划中,该机器人用于在真空腔室中进行硅片传输工作。实验结果表明该方法可以有效地提高机器人的定位精度和效率并减少系统的残余振动。
In order to obtain high-precision and high-speed motion and reduce the residual vibration for vacuum robot,an asymmetric trajectory planning method with jerk bounded is presented.Constraints of the trajectory are firstly analyzed.And then according the definition of limitation values,all possible profile shapes are discussed.The algorithm and its implementation are proposed with a direct and complete method.At the end,we apply the proposed approach to high-precision vacuum cluster tool robot which is used in the vacuum chambers for handling semiconductor wafer.Experimental results show that the proposed method can improve the positioning accuracy and efficiency and reduce the residual vibration.
出处
《组合机床与自动化加工技术》
北大核心
2011年第10期13-16,共4页
Modular Machine Tool & Automatic Manufacturing Technique
基金
国家科技重大专项(2009ZX02012)
关键词
点到点运动
真空机器人
轨迹规划
point-to-point motion
vacuum robot
trajectory planning
