基于MEMS加工工艺的亚毫米波肖特基单端混频器

Schottky Single-terrninal Mixer of Sub-millimeter Wave Band Based on MEMS Manufacturing Technique

基于MEMS技术完成了一个360 GHz肖特基混频器的设计与加工制作。由于亚毫米波电路尺寸微小,通常的蚀刻方法不能满足加工精度要求,而MEMS工艺通过溅射、光刻、电镀等流程完全可达到亚毫米波电路的精度要求。由此得到的混频电路尺寸非常紧凑,可以满足小型化应用的需要。

A 360GHz Schottky Mixer is designed and manufactured based on the MEMS technique. The normal etching method using in microwave or millimeter wave circuits can＇t reach the precision requirement of sub-millimeter wave circuits due to their small scale, while the MEMS technique can make it by the process of sputtering, photoetching and electroplating. The mixer circuits made by the technique are very compact and suitable for the miniaturization application.