纳秒脉冲电源驱动提高KrCl^＊准分子灯辐射效率的实验研究

Experimental Study of Improving the Radiation Efficiency of the Excimer KrCl^＊ Lamps Driven by the Nanosecond Pulse Power

针对目前准分子灯效率偏低的现状,为了从电源角度提高准分子灯紫外辐射的效率,本文对电源驱动类型(正弦/脉冲)以及脉冲电源参数(极性、电压幅值、频率)对介质阻挡放电激发准分子KrCl*(222nm)紫外辐射的影响进行了实验研究。实验结果表明:脉冲驱动比正弦电压驱动紫外辐射的效率提升86.5%;电源的极性对灯的工作特性没有显著的影响,单向负脉冲效果略好些;随着电源电压幅值的增加,准分子灯紫外辐射强度增加,但紫外辐射效率下降;频率升高,准分子灯紫外辐射强度提高,效率随频率变化不明显。本文还对实验结果作了简要分析和理论解释。

The UV radiation efficiency of excimer UV lamps is relatively low.In order to improve the efficiency from the aspect of power supply,the influence of driven type（sine / pulse） and pulse power supply parameters（polarity,voltage amplitude,frequency） on the excimer KrCl＊（222nm） UV radiation have been studied experimentally.The results show that： the efficiency of UV radiation under pulse driven is 86.5% higher than that under sinusoidal driven;the polarity of power supply has no significant impact on working conditions of the lamp;with the increase of the supply voltage amplitude,UV radiation intensity increased,while the efficiency of UV radiation decreased;and with the increase of frequency,excimer UV light intensity increased,while the efficiency did not change significantly.The article also gives a brief analysis and theoretical explanations of the experimental results.