摘要
介绍了用于电子束曝光机束斑和束流测量的高精度电流/电压转换放大器。根据束流极其微弱这一特定情况,为了得到超低漂移、超低噪声和强抗干扰的高精度性能指标要求,采用了对称补偿电路设计方案,合理选用高精度集成电路作为电路的核心器件。为了加强抗干扰能力,对关键技术进行了针对性的有效处理。通过实际工作运行,证明效果良好工作可靠,满足了电子束曝光机束斑和束流的高精度测量要求。
This paper presents the design and development of the high-precision amplifier which is used for the measurement of the electron-beam spot and current. In order to ensure uhralow-drift and uhralow-noise and stubborn aniti-disturbance to achieve ,this amplifier adopts the design scheme of the symmetry compensating circuit .In design of amplifier circuit, high- precision integrate circuits are reasonably used. In accordance with the technical requirement of stubborn aniti-disturbance, some key techniques have been properly handled. Through the test of the performance index and the practical usage, This measurement amplifier is proved to be satisfactory for the measurement amplification of the beam spot and the beam current.
出处
《电子设计工程》
2011年第20期72-75,共4页
Electronic Design Engineering
关键词
束流和束斑
超低漂移
超低噪声
强抗干扰
高精度
beam spot and beam current
uhralow-drift
uhralow-noise
stubborn aniti-disturbance
high-precision
