期刊文献+

超精密工作台洛伦兹电动机优化设计 被引量:1

Optimization of Lorentz Motor Used in Ultra-Precision Stages
下载PDF
导出
摘要 洛伦兹电动机广泛应用于超精密制造装备中。为提高洛伦兹电动机的推力输出和快速响应性能,降低发热功率,提出了一种综合评价超精密工作台驱动电机性能的优化指标。基于该优化指标,采用COMSOL Mu l-tiphysics和M atlab联合仿真方法,对一种Halbach磁钢阵列构型的洛伦兹电动机进行了尺寸参数优化设计。样机实验证明,优化后的洛伦兹电动机推力可以达到26.3 N/A,同时保证电气时间常数小于1 m s。 Lorentz motor is widely used in the uhraprecision manufacturing equipments. A novel criterion was proposed for optimization of Lorentz motor to improve dynamic response and decrease heat dissipation. The structure dimensional parameters of a Lorentz motor with Halbach magnet arrays was optimized by combined analysis of COMSOL Multiphysics and Matlab. The resulting Lorentz motor is validated by the experiment on prototype of which the force output is 26.3 N/A and the electrical time constant is less than 1 ms.
机构地区 清华大学
出处 《微特电机》 北大核心 2011年第10期1-3,80,共4页 Small & Special Electrical Machines
基金 国家高技术研究发展计划(863计划)项目(2009AA04Z148)
关键词 超精密工作台 洛伦兹电动机 优化设计 快速响应性能 ultra-precision stages Lorentz motor optimization dynamic response capability
  • 相关文献

参考文献7

  • 1吴德邻.姜科植物地理[A].见:路安民主编.种子植物科属地理[M].北京:科学出版社,1999.604-614.
  • 2Larsen K,Lock J M,Maas H,et al.Zingiberaceae[A].In: Kubitzki K eds.The Families and Genera of Vascular Plants[M].Berlin:Springer-Verlag,1998.474-495.
  • 3Wu D L,Wu Q G,Chen Z Y.Proceedings of the Second Symposium on the Family Zingiberaceae[M].Guangzhou: Zhongshan University Press,1996.23-27.
  • 4Sakai S,Kato M,Inoue T.Three pollination guilds and variation in floral characteristics of Boenean gingers (Zingiberaceae and Costaceae)[J].Amer J Bot,1999,86: 646-658.
  • 5邹继斌,王骞.音圈电机的电磁场计算与分析[J].微特电机,2008,36(2):4-6. 被引量:10
  • 6钱义咏.云南舞花姜属一新种[A]..中国科学院华南植物研究所集刊(第9集)[C].北京:科学出版社,1994.51-52.
  • 7宋志平,郭友好,黄双全.黄花蔺的繁育系统研究[J].植物分类学报,2000,38(1):53-59. 被引量:20

二级参考文献7

  • 1郭友好,Plant Evolutionary Biology,1994年,232页
  • 2Wang J B,武汉大学学报,1993年,39卷,6期,130页
  • 3王薇勤(译),Aquatic Plant Book,1993年,152页
  • 4孙祥钟,Flora Reipublicae Popularis Sinicae.Tomus 8,1992年,146页
  • 5John McBean, Cynthia Breazeal. Voice Coil Actuators for Human- Robot Interaction [ C ]//Proceedings of 2004 IEEE/RSJ International Conference on Intelligent Robots and Systems. 2004 , 852 -858.
  • 6Beikimco Corporation. BEIKimco - VCA - AppGuide2002 [ R ]. Beikimco Corporation ,2002.
  • 7黄声华,陶醒世,傅光洁.音圈电机的数学模型及仿真[J].华中科技大学学报(自然科学版),1996,28(S2):73-76. 被引量:16

共引文献28

同被引文献21

  • 1方平,丁凡,李其朋,王传礼.高频动铁式电—机械转换器的研究[J].中国机械工程,2005,16(23):2090-2092. 被引量:5
  • 2郑永成,王洋,何建国,黄文.基于磁场分割的磁导计算与磁路设计[J].机械与电子,2006,24(7):11-13. 被引量:13
  • 3李恒,朱煜,贾松涛,武晨光.电磁式超精密微动工作台研究现状与方向[J].现代机械,2007(2):1-3. 被引量:6
  • 4林其任,赵佑民.磁路设计原理[M].北京:机械工业出版社,1987
  • 5Boshuisen R.Analysis and performance of a lightweight over-actuated 450mm wafer chuck[D].Delft:Delft University of Technology,2010.
  • 6Thompson E,Hellebrekers P,Hofemann P,et al.450mm wafer patterning with jet and flash imprint lithography [C]//SPIE Photomask Technology.Monterey,California,United States: International Society for Optics and Photonics,2013:88800J-88800J-8.
  • 7Vrijsen N H,Jansen J W,Lomonova E A.Comparison of linear voice coil and reluctance actuators for high- precision applications[C]//14th International Power Electronics and Motion Control Conference (EPE/PEMC).Ohrid,Republic of Macedonia: IEEE,2010:S3-29-S3-36.
  • 8Katalenic A.Control of reluctance actuators for high- precision positioning[D].Eindhoven:Eindhoven University of Technology,2013.
  • 9Lu X.Electromagnetically-driven ultra-fast tool servos for diamond turning[D].Massachusetts:Massachusetts Institute of Technology,2005.
  • 10Studer P A.A practical magnetic bearing[J].IEEE Tran.on Magnetics,1977,13(5):1155-1157.

引证文献1

二级引证文献1

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部