摘要
在我国洁净室技术起始于上世纪60年代,当时,洁净室技术是为满足军工、精密仪器、航空仪表和电子行业的产品质量需求,满足这些行业加工和实验研究的精密化、微型化、纯度、质量和可靠性而诞生的一门新兴技术[1]。利用PID控制原理,基于STEP7和WINCC的串级PID来控制风柜的阀门,从而实现对被控区域温湿度精准的控制。该系统控制方案已经应用于某实验室的洁净室控制风柜,使用结果表明,该系统控制方案具有控制方便,控制效果好,响应速度快,稳定度高,精度高等优点,且各项性能指标均符合要求。
Clean room technology in China was originated in the 60s of last century.At the time,clean room technology for the quality requirements of military,precision instruments,aircraft instrumentation and electronics industry,was borned as an emerging technology,to meet the needs of these industries processing and experimental study of precision,miniaturization,purity,quality and reliability.The system uses PID control principle,adopts Siemens PLC S7-300,on the base of STEP7 and WINCC＇ s cascade PID to control air cabinet,to achieve the precise temperature and humidity on the charged area。The system control program has been applied to a laboratory clean room control air cabinet,The results show that the system control program is easy to control,good effect,Fast response;High stability;and high precision。 Besides,the performance indicators are in line with requirements.
出处
《电子测试》
2011年第10期83-88,共6页
Electronic Test
关键词
串级PID控制
闭环控制
温湿度
cascade PID control
closed-loop control
precise temperature and humidity
