扩散/氧化工艺控制管理系统的研制

Development of Diffusion/Oxidation Process Control Management System

本文给出一种半导体扩散/氧化生产工艺控制管理系统。系统由下位工艺控制单元和上位管理计算机组成。下位工艺控制单元实现扩散/氧化工艺要求的温度、气体流量控制及推拉舟位置控制。上位管理计算机实现扩散/氧化工艺管理、分析、与下位工艺控制单元互传信息。

This paper presents a semiconductor diffusion/oxidation production process control management system.The system comprises the lower control unit and the upper management computer.The lower control unit achieves the control of temperature,gas flow and push-pull boat based on the diffusion/oxidation process.The upper management computer achieves diffusion/oxidation process management,analysis,and the exchange of information with the lower control unit.