摘要
介绍了自行设计、制造的三氯氢硅合成炉加热装置的结构及使用效果。
The structure and application effect of a heating device designed and made by oneself for trichlorosilane synthesis furnaces are introduced.
出处
《氯碱工业》
CAS
2011年第10期40-41,共2页
Chlor-Alkali Industry
关键词
三氯氢硅
合成炉
电阻丝加热
trichlorosilane
synthesis furnace
resistance wire heating
