微陀螺模态特性的参数化分析方法

Parametric Analysis Method of Modal Characteristics for Micromachined Gyroscope

模态分析是微陀螺结构设计的重要环节,针对一种采用L形截面悬臂梁支撑的微陀螺结构,提出了参数化的模态分析方法。建立了微陀螺的参数化模型,以VC作为封装ANSYS的APDL命令流的工具,开发了微陀螺参数化的模态分析模块。利用该模块研究了微陀螺模态频率随主要结构尺寸变化的规律,发现对模态频率影响较大的是硅结构的厚度和支撑梁的宽度,并通过优化结构尺寸使其模态频率完全匹配。

Modal analysis is very important for designing micromachined gyroscope.This paper proposes a parametric method for modal analysis of the micromachined gyroscope which is suspended by a cantilever of L-shaped cross section.The parametric finite element model of the micromachined gyroscope is built.The APDL command stream is encapsulated based on VC language,and a parametric module is developed to analyze the modal characteristics of the gyroscope.Then,the correlation between the modal frequencies and the primary dimensions of the gyroscope is studied.It ＇ s found that the thickness and the width of the support beam have a great impact on the modal frequencies.Finally,the resonant frequencies of the drive mode and sense mode are matched by optimizing the structure dimensions.