摘要
对多线切割张力控制技术进行论述,分析了多线切割机中张力控制技术的特点,在此基础上,提出了一种多线张力的控制方法。该方法基于对张力信号变化的实时检测,将检测张力的变化转变为电机扭矩的变化,通过控制扭矩电机的扭矩来调整切割线张力,由控制软件来实现对切割线张力的检测、分析与控制。控制精度高,成功实现了在双主辊系统驱动下的多线切割机张力控制。实验证明,该方法可靠、稳定,能很好地检测并控制多线切割系统张力精度。
Tension control technology for multi-line cutting was discussed and its characteristic was analyzed, then a method for controlling multi-line tension based on real-time detection about tension signal change was put forward. The tension of cutting line was adjusted by controlling the torque of motors after the tension's change being transformed into the torque change of motors. The detection analysis and control of cutting line tension were achieved by control software and have the characteristic of high control precision, tension control of multi-line cutting was successfully realized under the drive of two-roller system. Experiments show that the method is reliable and stable, it can detect and control tension precision of multi-line cutting system.
出处
《半导体技术》
CAS
CSCD
北大核心
2011年第11期885-889,共5页
Semiconductor Technology
关键词
张力
扭矩
张力检测
张力控制
多线切割机
tension
torsion
tension test
tension adjustment
multi-wire saw