高温高压固态复分解反应法生长氮化镓的应变性质研究

A Study of Strain States of Gallium Nitride Prepared Through Solid-State Metathesis Reaction Under High Pressure and High Temperature.

本文采用高温高压下固态复分解反应法生长氮化镓。用X射线衍射仪、扫描电子显微镜、激光拉曼光谱仪对其进行分析,结果表明生成了六角纤锌矿结构的氮化镓晶体。该样品在宏观上受到了张应力的作用,退火后,宏观的应变状态由张应变向压应变转变;晶体微观应力减小,晶粒尺寸变大,晶体质量变好。

Gallium nitride（GaN） crystals have been prepared through solid-state metathesis reaction under high pressure and high temperature. X-ray diffraction（XRD）,Scanning e- lectron microscopy（SEM）and Raman spectra（Raman） were used to analyse the crystals. The results indicated that the crystals were hexagonal Gallium nitride and its maerostress was tensile. After anneal, the strain states of the crystals changed from tensile to compressive, and the microstress reduced, the size increased and the quality became better.