基于Cr金属薄膜的低反射近红外黑膜的制备与光学性能

Fabrication and optical properties of near infrared black coating with low reflectivity based on Cr metal coating

在光通讯分光器件中,光被分光后,总是存在一部分光无法被利用,成为对系统有害的杂散光,要求被完全吸收,同时要求其不能由于反射沿原光路返回,影响前级元件的性能.这就要求制备一种近红外黑膜,既要完全吸收光波,同时又不存在反射光.在以Cr金属膜为基础,在工作波段1 100～1 650 nm之间,设计了一种低反射近红外吸收膜,并采用离子束辅助蒸发技术在玻璃基底上制备了此黑膜,采用分光光度计测量了其透光率与反射率,透光率达到-32 dB以下,表面反射在1 100～1 650 nm之间小于0.5%.采用3M 600P胶带对薄膜的附着力进行了测试,薄膜附着力良好.实验结果表明该膜系完全达到高吸收和低反射的黑膜使用要求.

In tele-communication beam splitting device,there is always part of light been abandoned after splitting,which maybe become the harmful scattering light and should be absorbed 100%.And such light should not return along the light path,which will affect the priority components ＇ performance.So,this requires fabricating one kind of black coating in near infrared region,which not only 100% absorb the light,but has very low reflectivity.In this paper,based on Cr metal coating,between 1 100-1 700 nm,one kind of near infrared black coating with very low reflectivity was designed and fabricated by ion beam assisted electron beam evaporation.The transmission and reflectivity were measured by Shimadazu UV-3 600 spectrometer,and the transmission is lower than-32 dB;the reflectivity is lower than 0.5% between 1 100 nm and 1 650 nm.By 3M 600 tape,the coating ＇ s adhesion was tested and the results show that coating have good adhesion performance.So this black coating gets to the target of black coating with high absorption and very low reflectivity.