摘要
为了实现多参数综合测量,设计出一种小流量、压力、温度一体化传感器,该传感器主要由敏感元件和调理电路组成,信号输出采用0～5 V模拟输出。对传感器进行各项环境试验,试验结果表明:该传感器流量精度优于3%,压力精度优于0.2%,温度精度优于0.5%,流量热零点漂移小于0.2%FS/℃,压力热零点漂移小于0.1%FS/℃,满足使用要求。
The principle, design technology and fabrication of a kind of integrative sensor of small flow, pressure, temperature is introduced. The sensor is made up of sensitive element and modulating circuit is introduced. The signal output ranges 0 -5 V. Various environmental experiments are carried out on transducers, the resuhs show that the flow precision reaches 3 % , the pressure precision reaches 0.2 % , the temperature precision reaches 0.5 % ,and the flow thermal zero drift is less than 0.2 % FS/℃, the pressure thermal zero drift is less than 0.1% FS/℃. This transducer can satisfy the request of user.
出处
《传感器与微系统》
CSCD
北大核心
2011年第11期105-107,共3页
Transducer and Microsystem Technologies
关键词
流量
压力
温度
一体化传感器
flow
pressure
temperature
integrative sensor
