微喇曼和红外光谱法研究化学气相沉积金刚石多晶膜结晶质量特性

Optical Characterization of Chemical Vapor Deposited Large-grained Polycrystalline Diamond Films by Raman and Infrared Spectroscopy

研究了化学气相沉积多晶膜的宏观性能(颜色和透光性)与微观性能(结晶质量、相纯度和氢杂质含量)之间的关系,喇曼谱与金刚石膜中氢杂质含量(红外光谱测得)的关联性.给出了根据颜色和透明度来区分样本膜质量的实验依据,颜色较深的膜的结晶质量差、相纯度低、氢杂质含量高,1 332cm-1金刚石特征喇曼峰强度低,半峰宽大.由于多晶膜生长不均匀性、多晶以及粗糙度的影响,生长面的微喇曼光谱随采样点变化会产生较大的偏差,而光滑生长界面的喇曼光谱随采样点的变化偏差较小,因此生长界面的喇曼光谱更能反映化学气相沉积法制备金刚石膜的整体质量.

The relation between macro-properties and micro-quantities of the large-grained polycrystalline chemical vapour deposited diamond films was investigated. Considering the growth non-uniformity, the micro-Raman spectra measured on the top growth surface show large variation from spot to spot. Whereas, the micro-Raman spectra taken on the fine-grained smooth interface of the diamond films show that small deviation and generally can represent the overall quality of the large-grained polyerystaline diamond films, and correlate well with hydrogen content of the film measured by Fourier-transform infrared spectroscopy. It can be concluded that a diamond film with darker color or lower transparency has lower quality and lower phase purity characterized by the larger full width at half maximum （FWHM） and lower intensity of the diamond Raman peak around 1 332 cm^-1.