高精度物镜波纹管致动器的线性度分析

Linearity Analysis on Bellows Actuator of a Fine Objective Lens

采用有限元方法对高精度物镜波纹管致动器的几何非线性变形进行了分析,并引入线性度对波纹管致动器的性能进行了评估.通过有限元方法分析了常见的U型、S型、C型、方型及三角型波纹管的几何非线性变形,并结合最小二乘法,得到了上述各种波纹管致动器的行程及线性度.计算结果表明:在设计大行程波纹管致动器时,S型波纹管的线性度最好,为0.161%;而在设计小行程波纹管致动器时,三角形波纹管的线性度最好,为0.135%.

Geometrical nonlinearity of a fine objective lens＇ bellows actuator was analyzed with finite element method, and characteristics of bellows actuator were evaluated by linearity. Geometric nonlinear deformations of some common bellows（U shape, S shape, C shape, rectangle shape and triangle shape） were analyzed via the finite element method, the stoke and linearity of these actuators were obtain with the least square method. The results show that： the S shaped bellows, of which linearity is up to 0. 161%, is the best one for large stoke bellows actuator, and the triangle shaped bellows, of which linearity is up to 0. 135%, is the best one for small stoke bellows actuator.