140GHz关键射频组件研究

Research of 140 GHz critical RF components

在基于超外差体制的太赫兹无线通信系统接收机和发射机中,混频器、滤波器和本振源是决定系统性能的关键器件。本文分别针对基于肖特基二极管技术的140 GHz次谐波混频器、基于微机电系统(MEMS)体硅工艺的140 GHz带通滤波器和V波段毫米波本振倍频源的仿真设计和关键工艺开展了研究。测试结果表明:140 GHz次谐波混频器单边带转换损耗为26 dB,140 GHz带通滤波器的带内插损为8 dB,V波段毫米波本振倍频源最大输出功率大于50 mW(63.2 GHz^67.2 GHz)。

In terahertz communication system based on super-heterodyne structure,mixers,filters and local oscillators are the critical components in determining the performance of terahertz transmitter and receiver.In this article,the simulation and fabrication of the three critical components：140 GHz Subharmonic Mixer（SHM） based on Schottky diode,140 GHz Band Pass Filter（BPF） based on Micro Electro Mechanical Systems（MEMS） technology and V band multiplier,are described.The test results indicate that the SSB conversion loss of 140 GHz SHM is 26 dB;the insertion loss of 140 GHz BPF is 8 dB;the maximum output power of V band multiplier is beyond 50 mW（63.2 GHz-67.2 GHz）.