摘要
针对全自动划片机运动控制系统的特点,对S运动曲线加减速算法进行了深入分析,推导出S曲线加减速的计算公式,并通过试验仿真进行验证,根据分析结果得出S曲线是一种适合全自动划片机高速高精度运动的加减速算法。
According to the characteristic of automated Dicing machine,in this paper it studies the algorithm of S-shape curve,educing the function of S-shape curve.A simulate example is taken to test the algorithm of S-shape curve,the study shows that S-shape curve is available for the high speed and precision motion in automated dicing machine.
出处
《电子工业专用设备》
2011年第10期11-14,共4页
Equipment for Electronic Products Manufacturing
基金
国家重大专项课题(2009ZX02010-17)
关键词
全自动
晶圆
划片机
S曲线
Automation
wafer
Dicing Machine
S-shape curve
