摘要
介绍了晶片映射系统及其原理。该系统修正了机械手采用传统方式自动取片时执行效率低、料片状态无纠错功能的弊端,并详细论述了该系统的实现细节及算法。
Introduce Wafer Mapping System and its principle.The traditional system automatic running has lower efficiency and wafer state cannot detect.The new system fixes those faults.This article discusses the system implementation details and algorithm.
出处
《电子工业专用设备》
2011年第10期37-40,共4页
Equipment for Electronic Products Manufacturing
