半导体专用设备中机械结构的方案设计及发展前景

Product plan and future development perspective of style the mechanical structure design on equipment for semiconductor industry

根据目前我们进行半导体专用设备中机械结构设计时的主要思维特点,将产品方案的设计方法概括为系统化、结构模块化、基于产品特征知识和智能化四种类型,并总结出这四种方法的特点及其相互间的联系,提出半导体专用设备产品方案设计计算机实现的努力方向和发展前景。

According to the main thinking style of mechanical structure design on equipment for semiconductor industry,the design principles of product plan are summarized into the following four directions： systematism,modularization,characteristic based and intelligentized design,furthermore,the characteristic and relationship of the aforesaid principles are stated,in the end,computer implementation and future development perspective of the equipment for semiconductor industry are described.