PECVD法沉积类金刚石薄膜的耐腐蚀性能研究

Study of DLC Films Deposited by PECVD for Corrosion Resistance

金属材料在实际生活中应用广泛,但其易被摩擦磨损及易被腐蚀的特点成为其广泛应用中的主要障碍。本文介绍利用类金刚石(Diamond-like Carbon,DLC)的高硬度、低摩擦系数、高耐磨性及高化学稳定性等特点,采用等离子体增强化学气相沉积的方法,以C2H2为碳源、Ar为辅助气体在金属表面沉积DLC薄膜来提高金属的耐磨耐腐蚀性能。薄膜和基底的耐腐蚀测试分别用电化学腐蚀和烟雾腐蚀测量,DLC膜的化学结构和组成通过傅里叶红外光谱仪测量,文中讨论了DLC膜结构和组成对其耐腐蚀性能的影响。

Metal materials are used widely in daily life,however,they are always corroded and fretted easily,which restricts its development.Since Diamond-like Carbon（DLC） has amount of excellent characterization,such as high hardness,low friction coefficient,high chemical stability,thus in this paper,DLC films as the corrosion resistance layer were deposited on metal by capacitively coupled plasma（CCP）-enhanced chemical vapor deposition（RF-PECVD） powered by radio frequency.In here C2H2 as carbon source and Ar as the dilution gas were utilized to improve corrosion resistance.The corrosion resistant test on coatings and substrates were then examined separately by the potentiodynamic polarization measurement and salt-spray corrosion test.The chemical structure and composition of DLC films were analyzed by FTIR and the relationship to anti-corrosion property was discussed.