晶体生长过程建模及解耦控制

Modeling of Crystal Growth Process and Its Decoupling Control

晶体生长过程中其直径的控制是通过调节生长速度和热场温度而实现的。控制系统是一个双入双出系统,输入输出之间存在耦合关系。本文采用前馈补偿解耦的方法,实现了单晶炉生长控制中的解耦控制,并通过仿真及实验证明了方法的有效性。

In the process of growing crystal,the crystal diameter was controlled through adjusting the crystal lift rate and the heater temperature.Therefore,the crystal diameter control system is a multiple input multiple output system.Two input variables are the heater temperature and the crystal lift rate respectively.Two output variables are the crystal diameter and the crystal growing rate respectively.The inputs and outputs are mutally coupling.The feedfarward compensation decoupling method is proposed for decoupling control of the crystal growth control system.Simulation result and the corresponding experiment result show the effectiveness of the method.