摘要
介绍了用于高效太阳电池的几种硅基微纳结构的最新研究进展,重点介绍了几种硅基微纳结构的制备方法,如阳极腐蚀制备多孔硅、各向异性制绒以及气液固(VLS)生长纳米线等,并对各种方法的特点作了分析比较,指出了各种方法存在的问题。最后对今后研究的方向做了展望,由于太阳电池在性能提高以及产业应用方面的需求,未来用于高效太阳电池的硅基微纳结构仍是研究的热点之一。进一步提升其对太阳电池效率的优化能力将是研究的重要关注点,而其制备技术也将向着低成本、大规模及可控制的方向发展。
The latest research progresses of several silicon micro/nano structures which applied on high efficiency solar cells are introduced,with the emphasis on the fabrication methods of these structures,such as anodic etching for porous silicon,anisotropic etching for pyramids and vapor-liquid-solid for nanowires.The characteristics of these methods are analysed and compared,and the existed problems are pointed out.Finally,the research direction in future is prospected.Because of the demand of solar cells in performance improvement and industrial applications,the silicon micro/nano structures for high efficient solar cells are still one of hot topics in future.The optimizing ability of the silicon micro/nano structures to further enhance the solar cells efficiency will be the main research focus,and their fabrication techniques will develop toward the direction of low cost,large scale and easy control.
出处
《微纳电子技术》
CAS
北大核心
2011年第11期702-709,724,共9页
Micronanoelectronic Technology
基金
国家重点基础研究发展计划(2009CB939703)
国家自然科学基金项目(11104319
51172268)
中国科学院太阳能行动计划
创新团队项目
关键词
硅基微纳结构
太阳电池
陷光
纳米线
多孔硅
silicon micro/nano structure
solar cell
light trapping
nano wire
porous silicon