CVD金刚石膜高速机械研磨温度场的有限元模拟

Finite element simulation of the temperature field of CVD diamond films during high-speed mechanical polishing

CVD金刚石膜的高速机械研磨是一种高效的研磨方法,研磨区域的温度场分布直接影响金刚石膜的研磨质量。本文采用三维热-力耦合有限元法对三种不同运动条件下的温度场进行分析。结果表明:在不同的运动条件下,金刚石膜表面的温度场呈不均匀分布。当金刚石膜与砂轮作同向运动时,整个金刚石膜的温度差最小。文中得出的结论可以为提高工件表面平整性提供理论基础。

High-speed mechanical grinding of chemical vapor deposition（CVD） diamond films is an efficient grinding method,and the temperature field of grinding region affects the grinding quality of diamond films directly.In this paper,the temperature field was investigated by using three-dimensional thermo-mechanical coupling finite element method under three different movement conditions.The results indicated that the distribution of temperature on diamond films was inhomogeneous under different movement conditions.When the diamond films and grinding wheel rotated in the same direction,the difference of temperature of the whole diamond films was the smallest.The results of this paper would provide a theoretical basis to improve the smoothness of workpiece.