基于TDLAS技术的工业环境中HF气体在线监测

In-situ measurement of HF gas in industrial situation based on TDLAS technology

采用1.330μm附近波长的近红外可调谐分布反馈(DFB)激光器作为光源,结合波长调制技术和长光程技术,实时监测工业环境中的HF气体浓度。同时采用Allan方差分析系统的稳定性,选择利用非线性最小二乘法和防脉冲滑动平均滤波等技术手段,长时间测试结果表明,该系统具有实时、连续和非接触快速检测的特点,并且具有大范围、分布式监测的能力,可以满足工业环境中HF气体无组织排放安全检测的需求。

A distributed feedback （DFB） laser with central wavelength of 1. 330 μm is employed as the light source combined with wavelength modulation harmonic detection techniques and long optical-path techniques to in situ monitor HF gas concentration in industral situation. The system＇s stability is analyzed with Allan variance. The nonlinear least square method and the pulse-proof moving averaging filter are selected to eliminate the outside influence. Long term test results demonstrate that the developed system has the advantages of real time, continuous, non contact and fast monitoring, and it possesses the capability of large scale and distributed remote monitoring. It satisfies different requirements for online monitoring of industrial HF and other gas fugitive emissions.