摘要
为研究12μm厚聚酯膜固体径迹探测器的最佳蚀刻条件,方便固体径迹火化计数器的性能研究,本文通过三种不同的实验方法,对厚度为12μm的聚酯膜蚀刻条件进行分析研究。实验结果表明,12μm厚聚脂膜的最佳蚀刻条件:温度60oC,浓度6 mol/L的KOH溶液,蚀刻时间为3 h。
Solid track spark counting is a convenient way to investigate the best etching condition of polyesterfilms In this work, polyester films in thickness of 12 were etched in KOH solution in three groups of etching conditions, in term of the temperature, KOH concentration and etching hours. By comparing the spark counting curves, it was decided that the 12-μm thick polyester films could be etched best in a 6 mol/L KOH solution at 60℃ for 3 h.
出处
《核技术》
CAS
CSCD
北大核心
2011年第11期806-809,共4页
Nuclear Techniques
关键词
聚酯膜
蚀刻
径迹
火花计数器
Polyester-film, Etching, Track, Spark counter