基于图像配准的原子力显微镜图像热漂移失真校正

Using image registration method to correct AFM image distortion induced by thermal drift

在室温大气环境中,原子力显微镜(AFM)的热漂移会影响扫描过程中针尖定位的精度,导致扫描图像的失真,从而增大基于AFM图像的二维测量的误差。针对这种失真,在图像配准方法的基础上提出了热漂移补偿方法,通过建立热漂移的线性模型,校正扫描的AFM图像,从而恢复样品的真实形貌,有效提高了AFM图像二维平面内的测量准确性。

Under ambient conditions, thermal drift would limit positioning precision of an AFM tip, resulting in distortion of the scanned image. To remove this kind of imaging error, we developed a thermal drift compensation method based on image registration techniques. The image distortion can be efficiently removed, and the sample topography can be truly restored.