光波导微模具飞切加工工艺

Optical Waveguide Microstructure Mould Made by Fly-cutting Technique

针对目前模压制作工艺中高精度的光波导微模具加工工艺比较复杂的问题,基于金刚石超精密机械加工技术在光学元件微结构的广泛应用提出了光波导微模具的金刚石飞切高效快速的加工方法。通过超精密飞切加工系统以硬铝为模具材料进行了工艺优化的正交试验。试验结果表明:背吃刀量对光波导微结构表面质量的影响相当敏感,主轴转速对微结构表面质量的影响也比较大,进给量的影响则要小得多。综合考虑机床的稳定性及加工效率,确定了最优的光波导微模具的飞切加工工艺参数为:背吃刀量25μm、进给量20mm/min和主轴转速800r/min。通过优化工艺参数获得微结构侧壁表面粗糙度rms为17.1nm的光波导微模具。

The fly-cutting technique has wide application in optical microstructure manufacture.A unique method is put forward to achieve fast and high quality optical waveguide microstructure mould manufacture with fly-cutting technique after an analysis of the present complicated process technique.Fly-cutting orthogonal test was conducted to get the optimal process parameters for machining the waveguide mould.It is found that the microstructure surface roughness is sensitive to the cut depth first,the next two are the spindle speed and the feed speed.The optimal process parameters involve such figures as cut depth of 25μm,feed speed of 20mm/min and spindle speed of 800r/min through the experiment analysis considering the stability of the fly-cutting system and machining efficiency.The optical waveguide mold with microstructure surface root-mean-square roughness of 17.1nm was obtained through the optimal process parameters.