摘要
研究了针对于集成电路的聚合物涂层法电光检测技术,测量了模拟和数字的集成电路,从实验上取得了很高的系统空间分辨率。
This paper researches the photoelectric detection technology by polymer coatings in integrated circuit,measures the analog and digital integrated circuit and achieves the high system spatial resolution through experiments.
出处
《长春大学学报》
2011年第10期1-4,共4页
Journal of Changchun University
关键词
电光检测
空间分辨率
聚合物涂层
photoelectric detection
spatial resolution
polymer coating
