摘要
形状记忆合金(SMA)作为新型功能材料已广泛用于各种微电子机械系统(MEMS)中。此次研究是一种新型有阀微泵的设计。该微泵的结构简单,采用NiTi形状记忆合金薄膜作为微驱动薄膜,采用钢珠-弹簧作为单向阀的有阀微泵,钢珠和弹簧直径都为5mm,泵腔为直径10mm高为15mm的有机玻璃圆柱体。
Shape memory alloy are widely used in all kiods of micro-electro-mechanical system as a kind of new functional materials. This research is a new style valve micro-pump for designing. With simple structure, the micro-pump which use NiTi shape memory alloy film as the driver film. Especially, the micro-pump use steel ball-spring as a one-way valve. About the micro-pump, the diameter of steel ball-spring is 5mm, pump chamber 10mm, height 15mm. In the study.
出处
《科技信息》
2011年第29期116-116,172,共2页
Science & Technology Information
关键词
形状记忆合金
钢珠-弹簧
微驱动薄膜
微泵
Shape memory alloy
Steel ball-spring
Micro-driving film
Micro-pump