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基于NiTi形状记忆合金精密微泵的设计

基于NiTi形状记忆合金精密微泵的设计
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摘要 形状记忆合金(SMA)作为新型功能材料已广泛用于各种微电子机械系统(MEMS)中。此次研究是一种新型有阀微泵的设计。该微泵的结构简单,采用NiTi形状记忆合金薄膜作为微驱动薄膜,采用钢珠-弹簧作为单向阀的有阀微泵,钢珠和弹簧直径都为5mm,泵腔为直径10mm高为15mm的有机玻璃圆柱体。 Shape memory alloy are widely used in all kiods of micro-electro-mechanical system as a kind of new functional materials. This research is a new style valve micro-pump for designing. With simple structure, the micro-pump which use NiTi shape memory alloy film as the driver film. Especially, the micro-pump use steel ball-spring as a one-way valve. About the micro-pump, the diameter of steel ball-spring is 5mm, pump chamber 10mm, height 15mm. In the study.
作者 曹金辉 王波林 叶超 王欢
机构地区 南昌工程学院
出处 《科技信息》 2011年第29期116-116,172,共2页 Science & Technology Information
关键词 形状记忆合金 钢珠-弹簧 微驱动薄膜 微泵 Shape memory alloy Steel ball-spring Micro-driving film Micro-pump
分类号 TH3 [机械工程—机械制造及自动化]
  • 相关文献

参考文献5

  • 1O.C.Jeong. S.S.Yang. Fabrication and Test of a Thermopneumatic Micropmnp with a Corrugated Diaphragm. Stnsors and Acutuators A, 2000(83):249-255.
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  • 3T,Y.Jiang. T.Y.Ng and K.Y.Lam. Dynamic Analysis of an Electrostatic Micmpump. Technical Proceedings of the MSM 2000 International Conference onModeling and Simulation of Microsystem. MSM200.San Diego,CA,USA,2000,March 27-29.
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科技信息
2011年 第29期

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