论多晶硅生产废气回收的必要性

On the Necessity for Recycling of Exhaust Gas in Polysilicon Production

介绍了某企业多晶硅生产过程中废气的来源和组成,对废气回收的必要性进行了论述。

In a 3,000 t/a polysilicon project with modified Siemens process,the low-boiling-point compositions which are produced in production systems are not recycled for some design and production reasons.As a result,the severe exceeding standard of low-boiling-point compositions in the production systems makes the systems always excess pressure,which makes it is not easy for the safety operation for the system.Besides,the recycling systems do not classify the discharge,then the off gas scrubber system do not work properly and the treatment cost is increased.This makes a lot of material waste and increases the production cost.In order to save production costs and reduce the treatment costs,it is urgent to recycle the exhaust gas.