摘要
研制了一种下一代小型化实时成像的激光雷达样机,这种新的激光雷达系统由激光二极管、准直镜、MEMS微扫描器、收集光学、带通滤波器、光电探测器和信号处理装置组成,其核心器件是基于MEMS的微扫描反射镜。详细分析了系统的结构和参数,结果表明:其距离分辨率为1cm,视场角为24°,谐振频率为1.5kHz。该下一代MEMS微扫描器激光雷达系统具有高精度、低成本、小体积和三维实时成像等优点。
A small size ladar design is implemented for real-time imaging.The new ladar system consists of laser diode,collimating lens,MEMS microscanner,receiving optics,bandpass filter,photodetector and signal processing devices,in which MEMS is the core device.The systematic structure and parameters are analyzed in detail,and the results are achieved： the range resolution of about 1 cm,FOV of 24° and resonant frequency of 1.5 KHz.Next-generation MEMS ladar system owns characteristics of high accuracy,low price,small size,three dimension and real-time imaging.
出处
《半导体光电》
CAS
CSCD
北大核心
2011年第5期707-709,732,共4页
Semiconductor Optoelectronics
基金
国家自然科学基金项目(60736010)
